发明名称 Semiconductor devices and method of manufacturing them
摘要 The present invention aims to suppress the diffusion of p-type impurities (typically magnesium), included in a semiconductor region of a III-V compound semiconductor, into an adjoining different semiconductor region. A semiconductor device 10 of the present invention comprises a first semiconductor region 28 of gallium nitride (GaN) including p-type impurities that consist of magnesium, a second semiconductor region 34 of gallium nitride, and an impurity diffusion suppression layer 32 of silicon oxide (SiO2) located between the first semiconductor region 28 and the second semiconductor region 34.
申请公布号 US2009134456(A1) 申请公布日期 2009.05.28
申请号 US20060921085 申请日期 2006.05.25
申请人 SUGIMOTO MASAHIRO;KACHI TETSU;UESUGI TSUTOMU;UEDA HIROYUKI;SOEJIMA NARUMASA 发明人 SUGIMOTO MASAHIRO;KACHI TETSU;UESUGI TSUTOMU;UEDA HIROYUKI;SOEJIMA NARUMASA
分类号 H01L29/78;H01L21/336 主分类号 H01L29/78
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