| 摘要 |
A microelectromechanical (MEMS) device (800) includes a substrate (802), an actuation electrode (804) over the substrate (802), a reflective layer (810) over the actuation electrode (804), and a support layer (808) between the actuation electrode (804) and the reflective layer (810). The reflective layer (810) includes at least one aperture (814) through the reflective layer (810). The support layer (808) includes a recess (812) between the actuation electrode (804) and the at least one aperture (814). Upon application of a control signal to the device (800), at least a first portion (816) of the reflective layer (810) is configured to move into the recess (812) and at least a second portion (818) of the reflective layer (810) is configured to remain stationary. The reflectivity of the MEMS device (800) is dominantly modulated by changing a phase difference between light reflected from the first portion (816) and light reflected from the second portion (818). |
