| 摘要 |
PROBLEM TO BE SOLVED: To provide a gate valve device capable of restraining operation time in a target time, without generating a particle and reducing the service life of a mechanism part. SOLUTION: This gate valve device 30 is arranged on a side wall of a vacuum processing chamber 10, for opening-closing a carrying-in-and-out port 10a for carrying in and out a glass substrate G, and has a valve element 33 for opening-closing the carrying-in-and-out port 10a, an air cylinder 36 for driving the valve element 33, and an air driving circuit 60 controlling driving of the valve element 33 so as to make a moving speed of the valve element 33 different in response to the position of the valve element 33. COPYRIGHT: (C)2009,JPO&INPIT
|
