| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pattern drawing device for drawing a pattern on a substrate which is continuously moved relative to a projection optical system while increasing the moving speed of the substrate to improve the drawing speed of the pattern on the substrate, resulting in the improved pattern drawing efficiency of the pattern drawing device. <P>SOLUTION: In the pattern drawing device 1, a substrate drive mechanism 2, a first light source 51 and a second light source 52 are synchronously controlled so that pulse lights alternately emitted from both light sources at equal intervals are combined and repetitively emitted to the substrate 9 being continuously moved to draw a drawn pattern. Thus, as compared with a pattern drawing device having only one light source, the frequency of the lights emitted to a region where one drawn pattern element is drawn on the substrate 9 can be doubled and the moving speed of the substrate 9 in the main scanning direction during drawing the pattern can be increased to improve the drawing speed of the pattern on the substrate 9. This results in the improved pattern drawing efficiency of the pattern drawing device. <P>COPYRIGHT: (C)2009,JPO&INPIT |
