| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus which prevents the refraction of laser beam emitted along a liquid beam jetted from a nozzle. <P>SOLUTION: The laser beam machining apparatus comprises: a chuck table; a laser beam irradiating means irradiating a workpiece held on the chuck table with a laser beam; and a machining feed means performing machining feed to the chuck table. The laser beam irradiating means comprises: a laser beam oscillating means; a machining head condensing the laser beam oscillated by the laser beam oscillating means; and a liquid supplying means supplying a liquid to the machining head. The machining head comprises: a jet nozzle jetting the liquid fed from the liquid supplying means along the optical axis of the laser beam; and a gas circulating tube which is arranged below the injection nozzle, forms a passage passing through a liquid column jetted from the nozzle, and has a tubular body with a jetting port at the lower edge, and the passage of the gas circulating tube is provided with a gas feeding means feeding a gas. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
