发明名称 METHOD FOR MANUFACTURING GLASS CLICHE USING LASER ETCHING AND APPARATUS FOR LASER IRRADIATION THEREFOR
摘要 A method for manufacturing a glass cliche using laser etching includes a dipping step for dipping a glass cliche, which will be etched, into an etching solution, a patterning step for irradiating laser to the glass cliche dipped in the etching solution to form a pattern therein, and a washing step for washing the patterned glass cliche. This method allows making a cliche with a high aspect ratio and fine line widths in comparison to a conventional cliche manufacturing method using photoresist for etching, and also ensures more efficient energy consumption and higher etching efficiency rather than an etching method using laser only.
申请公布号 WO2009045028(A3) 申请公布日期 2009.05.28
申请号 WO2008KR05719 申请日期 2008.09.26
申请人 LG CHEM, LTD.;SHIN, BU-GON 发明人 SHIN, BU-GON
分类号 G02F1/13 主分类号 G02F1/13
代理机构 代理人
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