发明名称 CHECK VALVE AND SUBSTRATE TREATMENT DEVICE USING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a check valve which does not cause a trouble of a space and has simple structure. <P>SOLUTION: The check valve 40 which is arranged in piping 20 having a fluid passage, and prevents the generation of a back flow in the fluid passage includes: a cylindrical body 41 in which a part of the fluid passage is formed; a valve element 42 which is arranged in the cylindrical body 41, and can turn between a closing position for closing the fluid passage and an opening position for opening the fluid passage; a turning shaft 43 which is horizontally arranged so as to divide the valve element 42 into a large area 42a and a small area 42b, and serves as the turning center of the valve element 42; and a locking member 44 for locking the valve element 42 to the closing position. The mass of the small area 42b is made larger than that of the large area 42a. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009115205(A) 申请公布日期 2009.05.28
申请号 JP20070288801 申请日期 2007.11.06
申请人 TOKYO ELECTRON LTD 发明人 WAKABAYASHI SHINJI
分类号 F16K15/03;F16K1/22;F16K51/02;H01L21/3065 主分类号 F16K15/03
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