| 摘要 |
PROBLEM TO BE SOLVED: To provide a self-alignment mechanism in contact between an electronic component and a probe card which properly overcomes a contact failure caused by an inclination between an electrode group in the electronic component and a contact group in the probe card i.e. an inclination between the electronic component and the probe card, and secures the reliability of the contact between the electrode group and the contact group if the probe card is applied as a contact means between the electronic component and an inspection apparatus. SOLUTION: In the self-alignment mechanism in the contact between the electronic component and the probe card, a supporting/pressing member 7 is disposed so as to maintain pressing contact on a back face 6b of a pressing member 6, a spherical body 8 is interposed between the supporting/pressing member 7 and the pressing member 6, the pressing member 6 freely adjusts movement through the spherical body 8, and the pressing contact is obtained between the contact group 4 and the electrode group 2 if a back face 3b of the probe card 3 is plane-pressed by a front face 6a of the pressing member 6, and the contact group 4 disposed on a front face 3a of the probe card 3 is pressed to and contacts with the electrode group 2 in the electronic component 1. COPYRIGHT: (C)2009,JPO&INPIT
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