| 摘要 |
FIELD: instrument making. ^ SUBSTANCE: invention relates to instrument making and can be used in development and production of high-output high-efficiency excimer lasers with the 20 to 40 ns-long radiation pulses. In compliance with this invention, the proposed excimer laser features the discharge circuit inductivity allows the discharge current density increase rate of dj/dtëÑ5x1010 A/cm2s and firing the pump discharge with specific power of 30.5 MV/cm3. ^ EFFECT: higher efficiency and output of laser generation. ^ 1 dwg |
