发明名称 |
Manufacturing method of thin film transistor |
摘要 |
The invention provides a manufacturing method of a circular thin film transistor of which shape is more controlled than the conventional case, while simplifying the steps and reducing the manufacturing time and cost by forming a circular thin film transistor by a maskless process such as a droplet discharge method. In the invention, a circular thin film transistor having a circular electrode is formed by stacking concentric circular thin films over a substrate by a maskless process such as a droplet discharge method. Moreover, a circular thin film transistor having a circular semiconductor layer may be formed by stacking concentric circular thin films over a substrate by a maskless process such as a droplet discharge method.
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申请公布号 |
US7537976(B2) |
申请公布日期 |
2009.05.26 |
申请号 |
US20060410259 |
申请日期 |
2006.04.25 |
申请人 |
SEMICONDUCTOR ENERGY LABORATORY CO., LTD. |
发明人 |
HIROSE ATSUSHI |
分类号 |
H01L21/84;H01L21/00;H01L21/285;H01L21/288;H01L21/445 |
主分类号 |
H01L21/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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