发明名称 Manufacturing method of thin film transistor
摘要 The invention provides a manufacturing method of a circular thin film transistor of which shape is more controlled than the conventional case, while simplifying the steps and reducing the manufacturing time and cost by forming a circular thin film transistor by a maskless process such as a droplet discharge method. In the invention, a circular thin film transistor having a circular electrode is formed by stacking concentric circular thin films over a substrate by a maskless process such as a droplet discharge method. Moreover, a circular thin film transistor having a circular semiconductor layer may be formed by stacking concentric circular thin films over a substrate by a maskless process such as a droplet discharge method.
申请公布号 US7537976(B2) 申请公布日期 2009.05.26
申请号 US20060410259 申请日期 2006.04.25
申请人 SEMICONDUCTOR ENERGY LABORATORY CO., LTD. 发明人 HIROSE ATSUSHI
分类号 H01L21/84;H01L21/00;H01L21/285;H01L21/288;H01L21/445 主分类号 H01L21/84
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