发明名称 Semiconductor laser device and method of manufacturing the same, and optical transmission module and optical disk apparatus using the semiconductor laser device
摘要 Provided are a semiconductor laser device capable of stable operation at the time of high power output without damage to a resonator end surface and a method of manufacturing the same, as well as an optical transmission module and an optical disk apparatus using the semiconductor laser device. A method of manufacturing a semiconductor laser device includes a laser wafer formation step of forming a laser wafer at least having a semiconductor layer to form a resonator end surface, a cleavage step of cleaving the laser wafer in the atmosphere and forming a semiconductor laser element having the resonator end surface, a contact step of brining the resonator end surface in contact with a nitrogen containing gas containing 90-100 volume % nitrogen for one hour or longer, and a reflectance control film formation step of forming a reflectance control film in contact with the resonator end surface.
申请公布号 US7537945(B2) 申请公布日期 2009.05.26
申请号 US20070730316 申请日期 2007.03.30
申请人 SHARP KABUSHIKI KAISHA 发明人 HIRUKAWA SHUICHI;KISHIMOTO KATSUHIKO
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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