| 摘要 |
<p>A substrate transport device comprises a transport means which transports a substrate on a horizontal transport track, an abutting member which positions the substrate by abutting to the end edge of the substrate being transported, and a drive means which moves the abutting member between an abutting position where the abutting member is on the transport track and a standby position where the abutting member is not on the transport track. The drive means moves the abutting member from the abutting position to the standby position to be away from the end edge of the substrate in a horizontal direction.</p> |
