发明名称 LASER ABLATION INDUCTIVELY COUPLED PLASMA MASS SPECTROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide a laser ablation inductively coupled plasma mass spectroscope capable of reducing variations in ion intensity. SOLUTION: The laser ablation inductively coupled plasma mass spectroscope 1 includes a laser ablation part 3 in which laser is irradiated on a test piece to vaporize the test piece and to make it a test piece gas and the test piece gas is emitted together with a carrier gas, an inductively coupled plasma mass spectrometry part 5 in which the test piece is ionized with the inductively coupled plasma as an ionizing source and mass spectrometry is carried out, and a mixing part 7 having a mixing chamber which is installed between a laser ablation part and the inductively coupled plasma mass spectrometry part and in which the test piece gas and the carrier gas are uniformly mixed. COPYRIGHT: (C)2009,JPO&INPIT
申请公布号 JP2009110853(A) 申请公布日期 2009.05.21
申请号 JP20070283279 申请日期 2007.10.31
申请人 TDK CORP 发明人 SASAKI YASUYOSHI;KIKUCHI SEIICHI;TAKAHASHI WATARU;ABE TORU
分类号 H01J49/10;G01N27/62 主分类号 H01J49/10
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