| 摘要 |
<P>PROBLEM TO BE SOLVED: To increase the current density of a discharge current, to increase the light emitting intensity and luminance of extreme ultraviolet light, to form a light condensing point, and to improve exposure accuracy. <P>SOLUTION: In the extreme ultraviolet light source unit comprising a means 18 for supplying a liquid raw material for emitting the extreme ultraviolet light into a container 1, a means 3 for irradiating the raw material with an energy beam and vaporizing it, a pair of discharge electrodes separated by a prescribed distance and arranged for heating and exciting the vaporized raw material by discharge and generating high temperature plasma, a means 17 for supplying pulse power between the discharge electrodes, a means 13 for condensing the extreme ultraviolet light emitted from the high temperature plasma generated by the discharge between the discharge electrodes, and a take-out part 14 for taking out the condensed extreme ultraviolet light, the pair of discharge electrodes are provided with disk-like rotary electrodes 6 and 8 which are respectively orthogonal to rotary shafts 7 and 9 and rotated around the rotary shafts, and one rotary electrode 8 is turned and displaced relative to the other rotary electrode 6 with a virtual straight line A passing through the rotary shafts 7 and 9 and the rotary electrodes 6 and 8 as a center. <P>COPYRIGHT: (C)2009,JPO&INPIT |
