WIRELESS ILLUMINATION SENSING ASSEMBLY

摘要

PROBLEM TO BE SOLVED: To provide a system that easily and accurately measures the illumination levels that are directed on wafers during a photolithography process in wafer fabrication. SOLUTION: A wireless illumination sensing assembly for sensing a property of illumination within a semiconductor processing environment is provided. The sensing assembly has a power source and a wireless communication module coupled to the power source. Measurement circuitry is also provided. At least one illumination sensor has an electrical characteristic that varies with the property of illumination. The illumination sensor(s) is/are coupled to the measurement circuitry. COPYRIGHT: (C)2009,JPO&INPIT