| 摘要 |
PROBLEM TO BE SOLVED: To provide an attachment for machining tool, achieving a minute processing of a large-size workpiece with high precision, by using a machining tool. SOLUTION: There are provided a tool fitting part for microfabrication for fitting a tool 4 for microfabrication to an attachment 5 for machining tool; a finely driving part having X, Y linear motors 515 and 524; and an attachment side fitting part 511D attachably/detachably fitted to the machining tool. A workpiece W can be finely processed, therefore, by finely moving the tool 4 for microfabrication, after roughly moving the attachment 5 for machining tool to a position near a finely processing position. Since the attachment 5 for machining tool is roughly moved to the position near the finely processing position, strokes of X, Y tables 512 and 521 for moving by a unit of nanometer need not to be prolonged. Thus, there is no possibility of generating a problem of insufficient rigidity involved in prolonging the strokes, and an influence of an increase of an inertia force and moment, and fine processing with high precision of the workpiece W is provided. COPYRIGHT: (C)2009,JPO&INPIT |
