| 摘要 |
PROBLEM TO BE SOLVED: To provide a light source device and an optical mask capable of reducing a center spot diameter and increasing the concentration degree of energy to a center spot. SOLUTION: The light source device 1 includes a laser light source 10, a convex lens 11, a convex lens 12, an aperture 13, a transmissive optical phase modulator 14, an optical mask 15 and a convex lens 16. When the optical mask is divided by p of individual circumferences of radii (r<SB>1</SB>to r<SB>p</SB>) concentric to a predetermined position (position where the main beam passes) to define regions A<SB>0</SB>to A<SB>p</SB>successively from the center, a region A<SB>m</SB>(m designates an even number from 0 to p) is an optically transmitting region, while a region A<SB>n</SB>(n designates an odd number from 0 to p) is an optically shielding region; and p designates an even number satisfying r<SB>p</SB>>r<SB>p-1</SB>>...>r<SB>2</SB>>r<SB>1</SB>and r<SB>p</SB>-r<SB>p-1</SB>>r<SB>p-1</SB>-r<SB>p-2</SB>>...>r<SB>3</SB>-r<SB>2</SB>>r<SB>2</SB>-r<SB>1</SB>>r<SB>1</SB>. COPYRIGHT: (C)2009,JPO&INPIT
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