发明名称 Production method for electroluminescent element
摘要 The present invention provides a method for manufacturing an EL element, capable of preferably carrying out the peeling operation at the time of peeling off an unnecessary layer such as a photoresist layer. This object is achieved by providing a method for manufacturing an EL element comprising: an organic EL layer forming process of forming an organic EL layer on a substrate, on which at least an electrode layer is formed; a peeling layer forming process of forming a peeling layer on the organic EL layer; a photoresist layer forming process of forming a photoresist layer on the peeling layer; a photoresist layer patterning process of patterning the photoresist layer by exposing and developing; an organic EL layer developing process of removing the organic EL layer of a part not covered with the photoresist layer; and a peeling layer peeling process of removing the photoresist layer laminated thereon by peeling off the peeling layer.
申请公布号 US7534557(B2) 申请公布日期 2009.05.19
申请号 US20040513954 申请日期 2004.11.09
申请人 DAI NIPPON PRINTING CO., LTD. 发明人 TACHIKAWA TOMOYUKI;ITO NORIHITO
分类号 G03F7/00;H05B33/10;H01L27/32;H01L51/40;H01L51/50;H01L51/56 主分类号 G03F7/00
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