发明名称 Modification of semiconductor surfaces in a liquid
摘要 Compositions and methods are provided herein that include modifications to at least one surface of a silicon-based semiconductor material. Modifications occur in a liquid and comprise alterations of surface states, passivation, cleaning and/or etching of the surface, thereby providing an improved surface to the semiconductor material. Modifications of surface states include reduction or elimination of an electrically active state of the surface, wherein, at the atomic level, the surface binding characteristics are changed. Passivation includes the termination of dangling bonds on the surface of the semiconductor material.
申请公布号 US7534729(B2) 申请公布日期 2009.05.19
申请号 US20060507223 申请日期 2006.08.21
申请人 发明人
分类号 H01L21/31;H01L21/469 主分类号 H01L21/31
代理机构 代理人
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