发明名称 Method for bonding semiconductor chip
摘要 A method for bonding a semiconductor chip is disclosed. In accordance with the method of the present invention, a front surface of a wafer is mounted in a wafer holder to face downward. Each of dies of the wafer is then pushed downward to a tray disposed therebelow, thereby eliminating a need for a separate flipping process of the semiconductor chip and two or more robot arms.
申请公布号 US7534703(B2) 申请公布日期 2009.05.19
申请号 US20070764860 申请日期 2007.06.19
申请人 SIGO CO., LTD. 发明人 KIM SUNG CHUL
分类号 H01L21/78 主分类号 H01L21/78
代理机构 代理人
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