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发明名称
APPARATUS AND METHOD FOR GENERATION A PLASMA
摘要
申请公布号
KR100898165(B1)
申请公布日期
2009.05.19
申请号
KR20060117125
申请日期
2006.11.24
申请人
发明人
分类号
H05H1/24;H05H1/34
主分类号
H05H1/24
代理机构
代理人
主权项
地址
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