SYSTEM AND METHOD FOR CONTROLLING THE MANUFACTURE OF DISCRETE PARTS IN SEMICONDUCTOR FABRICATION USING MODEL PREDICATIVE CONTROL,申请号KR20007014811-传众专利搜索

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发明名称	SYSTEM AND METHOD FOR CONTROLLING THE MANUFACTURE OF DISCRETE PARTS IN SEMICONDUCTOR FABRICATION USING MODEL PREDICATIVE CONTROL
摘要
申请公布号	KR100572039(B1)	申请公布日期	2006.04.18
申请号	KR20007014811	申请日期	2000.12.26
申请人		发明人
分类号	G05B19/418	主分类号	G05B19/418
代理机构		代理人
主权项
地址

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