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发明名称
LINEAR-FOCUSED BEAM ELLIPSOMETER
摘要
申请公布号
KR20090049951(A)
申请公布日期
2009.05.19
申请号
KR20070116334
申请日期
2007.11.14
申请人
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人
CHO, YONG JAI;CHEGAL, WON;CHO, HYUN MO
分类号
G01B11/06;G01B11/00;G02B27/00
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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