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发明名称
Miss align preventing pattern and method thereof between probe card niddle and pad
摘要
申请公布号
KR100897982(B1)
申请公布日期
2009.05.18
申请号
KR20070097157
申请日期
2007.09.27
申请人
发明人
分类号
H01L21/66
主分类号
H01L21/66
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代理人
主权项
地址
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