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发明名称
非极性第III-V族氮化物材料及制造方法
摘要
一种于任何适合之异种基板上,生成平坦、低缺陷密度及无应变之厚的非极性第Ⅲ-V族氮化物材料及元件之方法系提供的,该方法使用组建之奈米孔洞及奈米网络顺应层,以最小生成发生于该等奈米孔洞中之一方式,偕同着一HVPE、MOCVD、及整合之HVPE/MOCVD生成方法。该方法制造奈米网络其系由该非极性第Ⅲ-V族氮化物材料及使用以生成该材料之基板所构成,其中,该网络沿着该模板表面系连续的,且其中该等奈米孔洞可以为任何形状。
申请公布号
TW200921764
申请公布日期
2009.05.16
申请号
TW097136868
申请日期
2008.09.25
申请人
王望南
发明人
王望南
分类号
H01L21/20(2006.01);C30B29/38(2006.01)
主分类号
H01L21/20(2006.01)
代理机构
代理人
恽轶群;陈文郎
主权项
地址
英国
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