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发明名称
APPARATUS FOR REALTIME FILM THICKNESS MONITORING USING PHASE DIFFERENCE OF POLARIZED LASER AND THE METHOD THEREOF
摘要
申请公布号
KR20090048673(A)
申请公布日期
2009.05.15
申请号
KR20070114646
申请日期
2007.11.12
申请人
KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
发明人
LEE, JOO IN;YOO, YONG SHIM;JUNG, SOON IL
分类号
G01B11/06;G01B11/00
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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