| 摘要 |
PROBLEM TO BE SOLVED: To provide a film forming apparatus capable of preventing deformation of a three-dimensional hollow container formed of a plastic or the like which is to be treated with plasma. SOLUTION: The film forming apparatus includes a treatment tank which has a tool constituted of a dielectric material, having a space for storing the three-dimensional hollow container, and arranged therein, and performs film deposition by executing the plasma treatment on the three-dimensional hollow container, a high frequency power source for generating plasma inside the treatment tank, a process gas feeder for feeding process gas into the three-dimensional hollow container via a gas introducing pipe, and an evacuation unit for performing the evacuation of air from the inner side of the treatment tank. A conductive component is arranged at a part of the tool, and is connected to the gas introducing pipe to have the same electric potential. COPYRIGHT: (C)2009,JPO&INPIT
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