| 摘要 |
PROBLEM TO BE SOLVED: To provide a new method of manufacturing polycrystalline silicon by which the production cost of a silicon raw material is excellently reduced. SOLUTION: In the method of manufacturing the polycrystalline silicon, an inorganic silicate, water and fatty acid are mixed with each other and filtered to obtain a solidified material solidified in such a way that a fatty acid salt and a dehydrated polymer of Si(OH)<SB>4</SB>are incorporated. The fatty acid salt part is hydrolyzed by heating the solid material. The polycrystallization of Si is promoted caused by the hydrolysis. In another method, silicone oil and the fatty acid salt are mixed to obtain a fluid liquefied in such a way that the fatty acid salt and the silicone oil are incorporated. The fluid is applied on or filled into a desired base body to be thereby formed, then the formed material is heated to hydrolyze the fatty acid salt part to promote the polycrystallization of Si caused by the hydrolysis. COPYRIGHT: (C)2009,JPO&INPIT
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