ELECTRON EMITTING ELEMENT, ELECTRON SOURCE, IMAGE DISPLAY DEVICE, AND MANUFACTURING METHOD OF ELECTRON EMITTING ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide an electron emitting element of field emission type which realizes electron emission that carries out beam convergence by low electric field and can emit electrons with high efficiency at a low voltage and of which manufacturing process is easy, an electron source, and an image display device.

SOLUTION: A manufacturing method of the electron emitting element comprises a process to prepare beforehand a substrate having an insulating or a semi-conductive layer, and a process to expose the layer in an atmosphere including a neutral radical containing hydrogen.

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