发明名称 RETAINER AND SUBSTRATE STORING CONTAINER
摘要 Provided is a retainer which suppresses contamination and damages due to rotation of a substrate, eliminates possibilities of removal and breakage of the substrate by reducing a shock operated to the substrate and facilitates operation of attaching a cover body having the retainer to a container main body. A substrate storing container is also provided. A retainer (20) is composed of a frame body (21) mounted on the rear surface center section (13) of the cover body (10) of the substrate storing container; a pair of first elastic pieces (29), which protrude from a pair of facing pieces (22) of the frame body (21) to be close to each other; and a second elastic piece (31), which is supported by bent free end sections (30) of the pair of first elastic pieces (29) for holding a semiconductor wafer (W). On the outside closer to the facing pieces (22) of the frame body (21) than the free end sections (30) of the first elastic pieces (29), outer end sections (32) of the second elastic piece (31) are positioned. On the second elastic piece (31), a plurality of first and second holding sections (33, 34) for holding the front periphery of the semiconductor wafer (W) are arranged at an interval. The second holding section (34) is positioned closer to the outer end section (32) of the second elastic piece (31) than the first holding section (33).
申请公布号 WO2009060782(A1) 申请公布日期 2009.05.14
申请号 WO2008JP69765 申请日期 2008.10.30
申请人 SHIN-ETSU POLYMER CO., LTD.;OGAWA, OSAMU 发明人 OGAWA, OSAMU
分类号 H01L21/673;B65D85/86 主分类号 H01L21/673
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