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发明名称
Vorrichtung zum Trennen von zwei aufeinander angeordneten scheibenförmigen Elementen bei der Entnahme
摘要
申请公布号
DE502007000560(D1)
申请公布日期
2009.05.14
申请号
DE20075000560T
申请日期
2007.11.13
申请人
BRAIN, BERNHARD
发明人
BRAIN, BERNHARD
分类号
B24B37/34;H01L21/677;H01L21/683
主分类号
B24B37/34
代理机构
代理人
主权项
地址
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