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发明名称
METHOD FOR DRYING WAFER
摘要
申请公布号
KR100897581(B1)
申请公布日期
2009.05.14
申请号
KR20070116044
申请日期
2007.11.14
申请人
SILTRON INC.
发明人
LEE, GUN HO;CHOI, EUN SUCK
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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