发明名称 PROCESS TESTER AND TESTING METHODOLOGY FOR THIN-FILM PHOTOVOLTAIC DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide process testers and testing methodology for thin-film PV devices, which can provide information directly relating to fabrication processes through electrical testing. <P>SOLUTION: The present invention generally relates to process testers and methodology of fabricating the same, using standard photovoltaic cell processes. In particular, the present invention relates to process tester layouts which are defined by laser scribing, methodology for creating process testers, methodology of using process testers for photovoltaic line diagnostics, placement of process testers in photovoltaic module production, and methodology for creating design rule testers. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009105401(A) 申请公布日期 2009.05.14
申请号 JP20080270178 申请日期 2008.10.20
申请人 APPLIED MATERIALS INC 发明人 FREI MICHEL RANJIT;SU TZAY-FA
分类号 H01L31/04 主分类号 H01L31/04
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