| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of saving space and reducing costs. SOLUTION: The substrate processing apparatus includes a plurality of substrate processing chambers 230, 240, 250, and a common transfer chamber 220 for transferring a substrate W to each substrate processing chamber. In the substrate processing apparatus, prescribed processing is performed to the substrate W while transferring the substrate W in an upright posture. At least one of the substrate processing chambers 230, 240, 250 is arranged above or below the common transfer chamber 220, and a substrate passing port through which the substrate W can pass is arranged at a boundary section between the processing chamber and the transfer chamber 220. COPYRIGHT: (C)2009,JPO&INPIT
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