发明名称 POROUS PATTERN SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A semiconductor structure, device, and method of manufacturing the same are provided. The manufacturing method includes etching a substrate or the surface of a semiconductor layer formed on the substrate using a wet chemical etching method or a wet photoelectrochemical etching method to form a porous structure, and re-forming a desired semiconductor layer on the porous structure, so that reduced defect density of the re-formed semiconductor layer enables the porous structure to have improved performance and characteristics. Also, the method includes forming a porous structure on a semiconductor emission layer to increase light extraction efficiency of the semiconductor emission layer, and combining a fluorescent or light-emitting material with an internal or peripheral part of the formed porous structure to efficiently emit various colors of light.
申请公布号 WO2009038324(A3) 申请公布日期 2009.05.14
申请号 WO2008KR05464 申请日期 2008.09.17
申请人 CHUNGBUK NATIONAL UNIVERSITY INDUSTRY-ACADEMIC COOPERATION FOUNDATION;KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY;CHO, YONG HOON 发明人 CHO, YONG HOON
分类号 H01L33/00;H01L33/16 主分类号 H01L33/00
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