| 摘要 |
<P>PROBLEM TO BE SOLVED: To achieve the forecast of the limit of abrasion by forecasting the amount of abrasion of a contact section with the stator surface of a mobile by simple constitution, in a surface acoustic wave actuator. <P>SOLUTION: The surface acoustic wave actuator 1 includes: a stator 2 consisting of a piezoelectric substrate having a cross finger electrode 4 for exciting surface acoustic waves W; a high frequency power supply 11, which supplies the cross finger electrode 4 with power for excitation of surface acoustic waves; a mobile 3, which is driven by the surface acoustic waves W excited on the surface of a piezoelectric substrate (stator 2) by the cross finger electrode 4 and the high frequency power supply 11; an abrasion amount computer 12, which computes the amount of abrasion of the contact section, with the surface of the stator 2, of the mobile 3 in a unit drive cycle including acceleration and deceleration; an abrasion amount integrator 13, which integrates the computed amount of abrasion; and an output section 14, which displays the integrated amount of abrasion. Since the abrasion of the contact face of the mobile 3 arises at acceleration and deceleration, the integrated amount of abrasion is computed, based on the number of times of occurrence of unit drive cycles, the limit of abrasion is forecasted, and it is displayed on the output section 14. <P>COPYRIGHT: (C)2009,JPO&INPIT |
