| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical-path conversion mirror which can be formed integrally with a plurality of mirrors and which is high in precision and in productivity. SOLUTION: The optical-path conversion mirror formed in a planer optical waveguide circuit is provided with a mirror groove which is formed at the end part of an optical waveguide, and more deeply dug from the upper surface of an upper part clad than at least a core; a mirror-supporting body which is provided to contact both the wall surface of the mirror groove, which faces the end part of the optical waveguide, and a part of the bottom surface of the mirror groove which contacts the wall surface, wherein the mirror-supporting body is formed by curing a liquid-curing material; a feed groove which is connected to the mirror groove and feeds the liquid-curing material; a reflecting body which is formed to contact the mirror-supporting body and changes the optical path of the optical waveguide in the upward or downward direction to the substrate; and a liquid storage area which is formed on the surface of the upper part cladding that includes a part of the feed groove and feeds the liquid-curing material. COPYRIGHT: (C)2009,JPO&INPIT |
