| 摘要 |
PROBLEM TO BE SOLVED: To provide a steam pressure measurement device precisely measuring a stream pressure of a compound even with a steam pressure totally under a high-temperature state. SOLUTION: The device includes: a vacuum vessel 1 for installing a sample S to be measured; a referential vacuum vessel 2 the same as the vacuum vessel 1 in structure and dimension; a pressure measuring sensor 7 located in the vacuum vessel 1, and usable under a high-temperature state; a sensor 8 for pressure reference the same as the sensor 7 in characteristics; an ultrahigh vacuum evacuation device 3 for putting the insides of the vacuum vessels 1, 2 into ultrahigh vacuum states; a casing 9 for accommodating the vacuum vessels 1, 2 and isolating them from the outside; a temperature controller for controlling a temperature in this casing 9; and a controller for receiving detection outputs from the sensor 7 and the sensor 8 and determining the steam pressure of the sample S. COPYRIGHT: (C)2009,JPO&INPIT
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