发明名称 Electrode structures for use with charged particle beams
摘要 This invention describes the structure of an electrode cell formed from a plurality of individual electrodes 901-908, the cell being suitable for use as a RF multipole ion guide, quadrupole mass filter, collision cell, or ion trap within a mass spectrometry system. The plurality of electrodes 901-908 are arranged relative to one another to define a three dimensional geometric structure with individual ones of the plurality of electrodes located at each of the vertices of the geometric stucture and wherein each electrode of the cell presents a curved surface to each other electrode of the cell. The electrodes may have a spheroid, super-ellipsoid, hyperboloid or paraboloid shape. A plurality of the electrode cells may be arranged in a matrix with neighbouring cells sharing constituent electrodes (see Figure 13B). Also disclosed are micro-fabricated devices in which the plurality of individual electrodes (2206, 2207, 2212 and 2214 in Fig 22) are mounted in alignment features in respective submounts (2205B, 2208, 2213 and 2215) on supporting micro-benches (2201 and 2205).
申请公布号 GB2454508(A) 申请公布日期 2009.05.13
申请号 GB20070022038 申请日期 2007.11.09
申请人 MICROSAIC SYSTEMS LIMITED 发明人 ALAN FINLAY
分类号 H01J49/42 主分类号 H01J49/42
代理机构 代理人
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