| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an aluminum nitride sintered compact which has a characteristic that the temperature dependence of its volume resistivity is efficiently mitigated, and a method of producing the same. <P>SOLUTION: A mixed powder is obtained by adding a lanthanum compound powder of 3-13 wt.% (inner rate), expressed in terms of La<SB>2</SB>O<SB>3</SB>, to an aluminum nitride powder containing ≤0.5 wt.% oxygen and mixing them, and the obtained mixed powder is subjected to pressure sintering at 1,700-2,300°C under a non-oxidizing atmosphere, in a carbon mold. After pressure sintering, the temperature is lowered to at least 1,500°C at a lowering speed of ≤4°C/min. Thereby, the aluminum nitride sintered compact characterized in that the length of c-axis(lattice constant) of the aluminum nitride(AlN) particle is ≥4.9780Å and ≤4.9825Å, the content of lanthanum(La) is ≤2 wt.% expressed in terms of metal lanthanum, and a multiple oxide of lanthanum and aluminum is contained is produced. <P>COPYRIGHT: (C)2004,JPO |
