发明名称 SEMICONDUCTOR DEVICE AND MULTILAYER WIRING BOARD
摘要 A gas or an insulating material having a relative dielectric constant of not more than 2.5 on average is interposed between a first wiring layer and a second wiring layer included in a multilayer wiring structure. Between a wiring of the first wiring layer and a wiring of the second wiring layer, a conductive connector is arranged. Between a predetermined wiring of the first wiring layer and a predetermined wiring of the second wiring layer, an insulating heat conductor having a relative dielectric constant of not more than 5 is arranged.
申请公布号 EP2059103(A1) 申请公布日期 2009.05.13
申请号 EP20070806064 申请日期 2007.08.24
申请人 NATIONAL UNIVERSITY CORPORATION TOHOKU UNVERSITY;FOUNDATION FOR ADVANCEMENT OF INTERNATIONAL SCIENCE 发明人 OHMI, TADAHIRO
分类号 H05K3/46;H01L21/312;H01L21/768;H01L23/12;H01L23/522 主分类号 H05K3/46
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