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发明名称
FABRICATION METHOD OF PHASE-CHANGE MEMORY DEVICE
摘要
申请公布号
KR20090047716(A)
申请公布日期
2009.05.13
申请号
KR20070113703
申请日期
2007.11.08
申请人
HYNIX SEMICONDUCTOR INC.
发明人
LEE, KEUM BUM;CHAE, SU JIN;CHANG, HEON YONG;LEE, MIN YONG;LEE, HYUNG SUK
分类号
H01L27/115;H01L21/8247
主分类号
H01L27/115
代理机构
代理人
主权项
地址
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