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发明名称
PLAZMA CLEANING APPARATUS FOR A SEMICONDUCTOR PANEL
摘要
申请公布号
KR20090047648(A)
申请公布日期
2009.05.13
申请号
KR20070113590
申请日期
2007.11.08
申请人
VISON SEMICON CO., LTD.
发明人
KIM, TAE HOON
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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