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发明名称
GAS-COLLECTING UNIT, TEST HEAD, AND IC DEVICE TESTING APPARATUS
摘要
申请公布号
EP1645318(A4)
申请公布日期
2009.05.13
申请号
EP20040746843
申请日期
2004.06.25
申请人
ADVANTEST CORPORATION
发明人
NISHIURA, KOEI
分类号
H05K7/20;B01D19/00;G01N1/00;G01R31/28;G12B15/02;H01L23/44;H05K
主分类号
H05K7/20
代理机构
代理人
主权项
地址
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