| 摘要 |
A method of fabricating an acoustic micro-electrical-mechanical system (MEMS) on a substrate 10 comprises the steps of depositing first electrode 152, depositing a silicon nitride membrane 16 so that it is mechanically coupled to the first electrode, and depositing a silicon nitride back plate 18 on a second electrode 17, wherein the back plate is deposited with an increased tensional stress compared to the silicon nitride membrane. The device can be configured as a MEMS microphone, an ultrasonic transducer, an absolute or differential pressure sensor, or an immersion acoustic transducer. An array of MEMS microphones combined with signal processing circuitry can be operated as a directionally selective microphone. |
