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发明名称
APPARATUS FOR CHUCKING A SUBSTRATE AND METHOD OF CHUCKING THE SUBSTRATE
摘要
申请公布号
KR20090048202(A)
申请公布日期
2009.05.13
申请号
KR20070114482
申请日期
2007.11.09
申请人
ADP ENGINEERING CO., LTD.
发明人
PARK, CHAN SUK;KIM, JEONG HEE
分类号
H01L21/68;H01L21/687
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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