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发明名称
MICROELECTROMECHANICAL SYSTEMS ENCAPSULATION PROCESS WITH ANTI-STICTION COATING
摘要
申请公布号
EP2057093(A1)
申请公布日期
2009.05.13
申请号
EP20070841345
申请日期
2007.08.24
申请人
ROBERT BOSCH GMBH
发明人
VANCURA, CYRIL;ULM, MARKUS;STARK, BRIAN;METZ, MATTHIAS;FUCHS, TINO;LAERMER, FRANZ;KRONMUELLER, SILVIA
分类号
B81C1/00
主分类号
B81C1/00
代理机构
代理人
主权项
地址
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