发明名称 Measuring apparatus and measuring method
摘要 A measuring apparatus includes an interferometer for measuring a wavefront of light transmitted through a test object by interference between light under test passed through the test object and reference light, and measures a polarization characteristic of the test object. The measuring apparatus has a measuring unit for measuring a polarization characteristic matrix in a pupil plane of the test object while the reference light is blocked or a fringe scan is performed.
申请公布号 US7532019(B2) 申请公布日期 2009.05.12
申请号 US20060345220 申请日期 2006.02.02
申请人 CANON KABUSHIKI KAISHA 发明人 HAYASHI NAOTO;KURAMOTO YOSHIYUKI
分类号 G01R31/308 主分类号 G01R31/308
代理机构 代理人
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