PLASMA GENERATING BODY AND PLASMA GENERATING APPARATUS

摘要

Disclosed is a plasma generating body wherein cracks are not easily generated when a thermal stress is applied due to heat during operation. A plasma generating apparatus using such plasma generating body is also disclosed. The plasma generating body is provided with a first electrode (1), and a first insulating section (3) for supporting the first electrode (1); a second electrode (2) arranged on the first electrode (1) to face the first electrode, and a second insulating section (4) for supporting the second electrode (2); and a first side section (5), to which one end of the first insulating section (3) and one end of the second insulating section (4) are bonded, respectively. A first line segment formed by connecting the corners of an inner space (S) along a bonding section between the first insulating section (3) and the first side section (5) has a nonlinear portion. The inner space is composed of the first insulating section (3) and the first side section (5).