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发明名称
Vorrichtung und Verfahren zur chemischen Gasphasenabscheidung
摘要
申请公布号
DE112007000898(T5)
申请公布日期
2009.05.07
申请号
DE200711000898T
申请日期
2007.04.11
申请人
APPLIED MATERIALS INC.
发明人
CARLSON, DAVID;SANCHEZ, ERROL;KUPPURAO, SATHEESH
分类号
C23C16/448
主分类号
C23C16/448
代理机构
代理人
主权项
地址
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